White Light Interferometric Microscope System

Accurate sub-nano-surface profiler with non-contact measurement Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications. Key benefits Superior measurement performance Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process. […]

SKU : I-C93-BW-S50x
Manufacturer: Nikon Metrology

Accurate sub-nano-surface profiler with non-contact measurement

Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications.

Key benefits

Superior measurement performance

Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process.
Enables measurements with the same height resolution in a wide range of magnifications.
Enables measurement of both smooth and rough surfaces without changing measurement mode or optical filters.
Captures both an all-in-focus image and a surface height image.

Wide range of observation methods

The system can be used as an optical microscope. Brightfield, polarizing, DIC and fluorescence observations are all possible.

Untitled Document

High Pixel Resolution Model
BW-S501	BW-S502	BW-S503	BW-S505	BW-S506	BW-S507
Measurement optical system	Focus Variation with White Light Interferometry (FVWLI)
Height resolution (algorithm)	1pm (0.001 nm)
Step height measurement reproducibility	σ: 8nm / 8μm step height measurement
Number of pixels	2046 x 2046, 1022 x 1022 (selectable via software)
Height measurement time	38 s, 16 s / 10 μm scan
Height measurement range	< 90 μm	< 20 mm		< 90 μm	< 20 mm
Measurement field size (using 2.5X)	< 4448 x 4448 μm*
Piezo actuator	Objective lens driven			Nosepiece driven
Z axis	Manual	Electric		Manual	Electric
XY axis	Manual		Electric	Manual		Electric
Software	Bridgelements® software modules

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